amakuru

Tekinoroji yo guca insinga ya diyama izwi kandi nka tekinoroji yo gukata abrasive.Ni ugukoresha amashanyarazi cyangwa resin uburyo bwo guhuza diyama abrasive ihujwe hejuru yicyuma cyuma, insinga ya diyama ikora neza hejuru yinkoni ya silicon cyangwa ingunguru ya silicon kugirango itange urusyo, kugirango bigere ku ngaruka zo gutema.Gukata insinga za diyama bifite ibiranga umuvuduko wo gukata byihuse, gukata neza no gutakaza ibikoresho bike.

Kugeza ubu, isoko rimwe rya kirisiti ya diyama yo gukata silicon wafer ryaremewe rwose, ariko ryagiye rihura naryo murwego rwo kuzamurwa mu ntera, muri byo umweru wa velheti nicyo kibazo gikunze kugaragara.Urebye ibi, iyi nyandiko yibanze ku buryo bwo kwirinda insinga za diyama guca monocrystalline silicon wafer velvet ikibazo cyera.

Igikorwa cyo gukora isuku ya diyama ikata monocrystalline silicon wafer ni ugukuraho wafer ya silicon yaciwe nigikoresho cyuma cyuma cyuma cyakuwe mumasahani ya resin, kuvanaho reberi, no guhanagura wafer ya silicon.Ibikoresho by'isuku ahanini ni imashini ibanziriza isuku (imashini ya degumming) n'imashini isukura.Inzira nyamukuru yo gukora isuku yimashini ibanziriza isuku ni: kugaburira-spray-spray-ultrasonic isuku-degumming-amazi meza yoza-kugaburira.Igikorwa nyamukuru cyogusukura imashini isukura ni: kugaburira-amazi meza yoza-amazi meza yoza-alkali gukaraba-alkali gukaraba-amazi meza yoza-amazi meza yoza-mbere-umwuma (guterura buhoro) -kumisha-kugaburira.

Ihame ryo gukora velheti imwe

Monocrystalline silicon wafer nicyo kiranga kwangirika kwa anisotropique ya silicon wafer ya monocrystalline.Ihame rya reaction ni ikigereranyo cyimiti ikurikira:

Si + 2NaOH + H2O = Na2SiO3 + 2H2 ↑

Mubyukuri, inzira yo gushiraho suede ni: NaOH igisubizo kubipimo bitandukanye byo kwangirika kwubuso butandukanye bwa kirisiti, (100) umuvuduko wo kwangirika kurenza (111), bityo (100) kuri wafer ya monocrystalline wafer nyuma ya ruswa ya anisotropique, amaherezo ikorwa hejuru yubuso bwa (111) impande enye, arizo "piramide" (nkuko bigaragara ku gishushanyo 1).Imiterere imaze gushingwa, mugihe urumuri rwabaye kumurongo wa piramide kumurongo runaka, urumuri ruzagaragarira kumurongo kurundi ruhande, rukore urwego rwa kabiri cyangwa rwinshi, bityo bigabanye kugaragarira hejuru ya wafer ya silicon , ni ukuvuga, umutego wumucyo (reba Ishusho 2).Nibyiza ubunini nuburinganire bwimiterere ya "piramide", niko bigaragara umutego wumutego, kandi nubuso bwohereza hasi ya silicon wafer.

Igishushanyo 1: Micromorphologie ya monocrystalline silicon wafer nyuma yumusaruro wa alkali

Igishushanyo 2: Ihame ryumutego wumucyo wuburyo bwa "piramide"

Isesengura rya kirisiti imwe yera

Mugusuzuma microscope ya electron kuri wafer yera ya silicon, byagaragaye ko microstructure ya piramide ya wafer yera muri kariya gace ahanini itakozwe, kandi hejuru yasaga nkaho ifite igisigisigi cy '"ibishashara", mugihe imiterere ya piramide ya suede mu gice cyera cya silicon imwe ya wafer yakozwe neza (reba Ishusho 3).Niba hari ibisigara hejuru yubutaka bwa monocrystalline silicon wafer, ubuso buzaba bufite ahantu hasigaye "piramide" ingano yubunini hamwe nuburinganire bwuburinganire hamwe ningaruka zahantu hasanzwe ntibihagije, bikavamo ubuso bwa veleti busigaye burenze hejuru yubusanzwe, agace gafite imbaraga nyinshi ugereranije nubusanzwe busanzwe mumashusho agaragara nkumweru.Nkuko bigaragara muburyo bwo gukwirakwiza ahantu hera, ntabwo ari imiterere isanzwe cyangwa isanzwe ahantu hanini, ariko mubice byaho gusa.Byakagombye kuba ko imyanda ihumanya hejuru yubutaka bwa silicon itigeze isukurwa, cyangwa imiterere yubuso bwa silicon iterwa numwanda wa kabiri.

Igishushanyo 3: Kugereranya itandukaniro rya microstructure yo mukarere muri veleti yera ya silicon yera

Ubuso bwinsinga ya diyama ikata silicon wafer iroroshye kandi ibyangiritse ni bito (nkuko bigaragara ku gishushanyo 4).Ugereranije na minisiteri ya silicon wafer, umuvuduko wa reaction ya alkali hamwe ninsinga ya diyama ukata silicon wafer hejuru biratinda kurenza ibya minisiteri ikata monocrystalline silicon wafer, bityo rero ingaruka yibisigisigi byubuso ku ngaruka za veleti biragaragara cyane.

Igicapo ca 4:

Inkomoko nyamukuru isigaye ya diyama waciwe na silicon wafer hejuru

.Gukata amazi hamwe nibikorwa byiza bifite ihagarikwa ryiza, gutatanya hamwe nubushobozi bworoshye bwo gukora isuku.Ubusanzwe Surfactants ifite hydrophilique nziza, yoroshye kuyisukura mugikorwa cyo gukora isuku ya silicon.Gukomeza gukurura no kuzenguruka kwinyongeramusaruro mumazi bizatanga umubare munini wifuro, bigatuma kugabanuka kwamazi akonje, bigira ingaruka kumikorere yo gukonjesha, hamwe nibibazo byinshi byifuro ndetse nibibazo byinshi byuzuye, bizagira ingaruka zikomeye kumikoreshereze.Kubwibyo, ibicurane bisanzwe bikoreshwa hamwe na defoaming agent.Kugirango hamenyekane imikorere idahwitse, silicone gakondo na polyether mubisanzwe ni hydrophilique.Umuti mumazi uroroshye cyane kuri adsorb kandi ukaguma hejuru ya wafer ya silicon mugusukura nyuma, bikavamo ikibazo cyumwanya wera.Kandi ntabwo ihuye neza nibice byingenzi bigize ibicurane, Kubwibyo, igomba gukorwa mubice bibiri, Ibice byingenzi n’ibikoresho byo gusebanya byongewemo mumazi, Muburyo bwo gukoresha, ukurikije uko ifuro ryifashe, Ntibishobora kugenzura umubare gukoresha na dosiye yimiti igabanya ubukana, Irashobora kwemerera byoroshye kurenza urugero rwimiti ya anoaming, Bitera kwiyongera mubisigisigi bya silikoni wafer hejuru, Ntabwo byoroshye gukora, Nyamara, kubera igiciro gito cyibikoresho fatizo no gusebanya umukozi mbisi ibikoresho, Kubwibyo, ibyinshi muri coolant yo murugo byose bikoresha iyi formulaire;Indi coolant ikoresha agent nshya yo gusebanya, Irashobora guhuzwa neza nibice byingenzi, Nta byongeweho, Irashobora kugenzura neza no kugereranya ingano yayo, Irashobora gukumira neza ikoreshwa ryinshi, Imyitozo nayo iroroshye cyane gukora, Hamwe nuburyo bukwiye bwo gukora isuku, ibisigara birashobora kugenzurwa kurwego rwo hasi cyane, Mubuyapani hamwe nabakora inganda nke zo murugo bakurikiza ubu buryo bwa formula, Nyamara, kubera igiciro cyinshi cyibikoresho fatizo, Inyungu zacyo ntabwo zigaragara.

. insinga zatangiye gukata kuri reberi na plaque ya resin, Kubera ko inkoni ya silicon inkoni hamwe na resin byombi ari ibicuruzwa bya epoxy resin, Ahantu ho koroshya ni hagati ya 55 na 95 ℃, Niba ingingo yoroshye ya reberi cyangwa resin isahani ni mike, irashobora gushyuha byoroshye mugihe cyo gutema ikanayitera kworoha no gushonga, Yometse kumugozi wibyuma no hejuru ya silicon wafer, Bituma ubushobozi bwo guca kumurongo wa diyama bwagabanutse, Cyangwa wafer ya silicon yakiriwe kandi irangi hamwe na resin, Iyo imaze kwizirika, biragoye cyane gukaraba, Kwanduza gutya kugaragara cyane hafi yinkombe ya silicon wafer.

. na diyama yo gukata ifu ya silicon ingano nubunini biganisha byoroshye kuri adsorption hejuru ya silicon, bigatuma kuyisukura bigorana.Noneho rero, menya neza ivugurura nubuziranenge bwa coolant kandi ugabanye ifu iri muri coolant.

. umurongo wuzuye wumurongo, gukonjesha na minisiteri bifite itandukaniro rinini, kuburyo rero gahunda yo gukora isuku ijyanye, isuku yimiti ya dosiye, formula, nibindi bigomba kuba kubice byinsinga za diyama kora ibyo bihindura.Igikoresho cyo gukora isuku nikintu cyingenzi, umwimerere wambere wogusukura amata, alkalinity ntabwo ikwiranye nogusukura insinga ya diyama ikata silicon wafer, igomba kuba hejuru yubuso bwa diyama wire silicon wafer, ibigize nibisigara byubuso bwibikoresho bigamije isuku, hanyuma ukajyana inzira yo gukora isuku.Nkuko byavuzwe haruguru, ibice byo gusebanya ntibikenewe mugukata minisiteri.

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Mugabanye ikibazo cyo gukora umusatsi wa velhet yera bigaragara ibyifuzo

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(2) Koresha kole hamwe na plaque ikwiye kugirango ugabanye umwanda wa silicon wafer;

(3) Igikonjesha kivangwa n’amazi meza kugira ngo hatabaho umwanda usigaye mu mazi yakoreshejwe;

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.Muri icyo gihe, irashobora kandi kongera iterambere ryubushyuhe bwamazi, gutemba nigihe mugihe cyo kubanza gukaraba, kugirango ifu ya silicon yogejwe mugihe

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(7) Wafer ya silicon ituma ubuso butose mugihe cyo kwangirika, kandi ntibishobora gukama bisanzwe..

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.Ihame ryayo risa nigisubizo cyogusukura SC1 (bakunze kwita amazi 1) ya semiconductor silicon wafer.Uburyo bukuru bwayo: firime ya okiside hejuru ya silicon wafer ikorwa na okiside ya H2O2, yangizwa na NaOH, kandi okiside na ruswa bibaho inshuro nyinshi.Kubwibyo, ibice bifatanye nifu ya silicon, resin, ibyuma, nibindi) nabyo bigwa mumazi asukuye hamwe na ruswa;kubera okiside ya H2O2, ibintu kama kama hejuru ya wafer byangirika muri CO2, H2O hanyuma bikurwaho.Ubu buryo bwo gukora isuku bwabaye abakora wafer ya silicon bakoresheje ubu buryo kugirango batunganyirize isuku ya diyama ikata monocrystalline silicon wafer, silicon wafer mu gihugu ndetse na Tayiwani hamwe n’abandi bakora inganda za batiri bakoresheje ibibazo by’ibibazo byera byera.Hariho kandi abakora bateri bakoresheje inzira isa na veleti mbere yo gukora isuku, banagenzura neza isura ya veleti yera.Birashobora kugaragara ko ubu buryo bwo gukora isuku bwongewe mubikorwa byo gusukura silicon wafer kugirango ukureho ibisigisigi bya silicon kugirango bikemure neza ikibazo cyimisatsi yera kumpera ya bateri.

umwanzuro

Kugeza ubu, gukata insinga za diyama byahindutse ikoranabuhanga nyamukuru ryo gutunganya mu rwego rwo guca kristu imwe, ariko mu rwego rwo guteza imbere ikibazo cyo gukora umweru wa velheti ryateje ikibazo wa silicon wafer n’abakora bateri, bigatuma abakora bateri batema insinga za diyama. wafer ifite ukurwanya.Binyuze mu kugereranya agace k'umweru, biterwa ahanini n'ibisigara hejuru ya wafer ya silicon.Mu rwego rwo gukumira neza ikibazo cya silicon wafer mu kagari, iyi mpapuro irasesengura inkomoko ishobora guterwa n’umwanda wa silicon wafer, hamwe n’ibitekerezo ndetse n’ingamba zo kunoza umusaruro.Ukurikije umubare, akarere nuburyo imiterere yibibara byera, ibitera birashobora gusesengurwa no kunozwa.Birasabwa cyane cyane gukoresha hydrogen peroxide + inzira yo koza alkali.Ubunararibonye bwatsinze bwerekanye ko bushobora gukumira neza ikibazo cyinsinga ya diyama ikata silicon wafer ikora velheti yera, kugirango harebwe abinjira mu nganda rusange nababikora.